2001 HITACHI S-7840

Process Type: Metrology & Inspection

Date of Manufacture: 2001 

Status: Refurbished

Hitachi S-7840 configured for 6 or 8 inch (smaller wafer sizes possible)

SW Version: 11

Options list: 

SECS

Multipoint Measurement

Hole Measurement

Reduced Scan

Image Database

CP Controller

Save to DOS FD

IP Read

Operator Accessories