1998 Canon FPA-3000EX5

CANON - FPA-3000EX5 - DUV-Stepper

No missing parts, no damage

Wafer Size RangeMinimum200 mmMaximum200 mm

Year of Manufacture1998

ConditionGood

CE MarkedYES

Exterior DimensionsWidth74.803 in (190.0 cm)Depth98.425 in

(250.0 cm)Height102.362 in (260.0 cm)

Weight12,787 lb (5,800 kg)