SVT MBE Epitaxy System

Still in the crates but opened to get some images and details.

Never installed after the decommissioning 

Molecular Beam Epitaxy (MBE) System

Includes control rack/ source control cabinet

Includes UHV growth chamber assembly

Multiple source and process control components

Ideal for research and thin-film deposition applications

System Classification

Modular UHV thin-film deposition platform (MBE / PVD hybrid research system).

Core Architecture

Multi-port radial UHV chamber with ConFlat (CF) flanges enabling integration of multiple sources,

diagnostics, and transfer components.

Vacuum System

High-vacuum / ultra-high vacuum capable system using turbomolecular pumping (Pfeiffer HiPace

series), supported by a backing pump. Designed for pressures in the 10■■ Torr range.

Major Components Identified

- Pfeiffer Vacuum turbomolecular pump (HiPace series) - MDC Vacuum Products chamber

hardware and feedthroughs - Residual Gas Analyzer (RGA) for process monitoring - Pneumatic gas

lines and process control hardware - Stainless steel UHV-compatible chamber and fittings

Functional Capabilities

- Thin film deposition (sputtering / evaporation / possible MBE configuration) - Surface science

experimentation - Process gas introduction and control - In-situ gas analysis via RGA - Multi-source

deposition flexibility

System Origin

Likely custom-built or integrator-assembled system using industry-standard UHV components.

Common in university or R&D; lab environments.

Typical Applications

- Semiconductor R&D; - Materials science and thin film research - Coatings development - Surface

physics experiments

Market Positioning

Research-grade, non-production system. Value depends on completeness, included sources,

control systems, and pump condition.