1998 TEL ALPHA-8SE Doped Poly

Vertical Furnace

Furnaces/Diffusion Systems

Date of Manufacture: 1998-04-01

Currently Configured for: 200mm

Damage/Missing parts list:

Pumps, chillers, and support items may not be included, please inspect the tool to confirm.

TEL Doped Poly 100wf load: LPCVD Doped Poly

I-Type Layout

UB 90 x 90: US Specification