1999 TEL CLEANTRACK ACT8

Tool Status Connected

Wafer Size 200 mm

Fab Section Lithography

Vintage 1999

Asset Description TEL ACT8, 2 PRB, Photolithography Apply/Develop Track

Software Version 204000r130r131

CIM None

Process Photolithography Apply/Develop

Main System Main Tool Body 1

Options System Chem Cabinets 2

Others

Handler System Cassette Robot Arm 1

Handler System Interface Robot Arm 1

Handler System Process Robot Arm 2

Factory Interface Open Cassette 4

Excluded items list

IRA Z Driver1

ACT8 MainComputer1

Floppy Drive1

IRA Z Motor1

Developer Spin Driver 1