Tool Status Connected

Wafer Size 200 mm

Fab Section Lithography

Vintage 1999

Asset Description TEL CLEANTRACK ACT8, 2 PRB Apply Develop Photolithography Track

Software Version 204000r130r131

CIM NONE

Process Photolithography Apply/ Develop

Main System Main Tool Body 1

Handler System 3 axis robots; PRA; X, Y, Theta 2

Options System

Handler System 4 axis robots; CRA, IRA; X,Y, Z, Theta 2

Options System Chemical Cabinets 2

Options System

Factory Interface Open Cassette 4

Excluded Items List

3-2 Spin MotorDriver1

3-4 Spin MotorDriver1

Block 2 PRAPower Slice1

ACT8 MainController1

3-3 Spin MotorDriver1

1999 TEL CLEANTRACK ACT8