1997 NIKON NSR-2205i12D

Tool Status Connected

Wafer Size 200 mm

Fab Section Lithography

Vintage 1997

Asset Description Nikon 2205i12D

Software Version MCSV 2.41, OCSV 2.41

CIM SECS

Process Photolithography

Main System Main Body 1

Factory Interface Open Cassette 1

Options System

Handler System WL Type 3