1996 NIKON 2205i11D

Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Lithography

Vintage 1996

Asset Description 2205i11D

Software Version MCSV 2.41, OCSV 2.41

CIM SECS

Process Photolithography

Factory Interface Open Cassette 1

Others

Main System Main Body 1

Handler System WL Type 2 1