1996 NIKON NSR-2205i12D

Tool Status Connected

Wafer Size 200 mm

Fab Section Lithography

Vintage 1996

Asset Description Nikon 2205i12D

Software Version MCSV 2.41, OCSV 2.41

CIM SECS

Process Photolithography

Handler System WL Type 3 1

Factory Interface Open Cassette 1

Main System Main Body 1