2014 Tokyo Electron Ltd. Tactras Vesta

Vintage: 2014

Wafer size: 300mm

Asset HDD not included

Tool config is based on original PO, please verify tool details at tool inspection

Tool Model: VESTANV4

Process: POLY

System Power Rating: 208 VAC

Loading Configuration: 3 load port

Chm/Unit Position 1: VESTANV4; Chemicals / Gases Used: HBr, CH2F2, NF3, SF6

Chm/Unit Position 2: VESTANV4:Chemicals / Gases Used: HBr, CH2F2, NF3, SF6

Chm/Unit Position 3: RT3

Chm/Unit Position 4: RT3

Chm/Unit Position 5: VESTANV4; Chemicals / Gases Used: HBr, CH2F2, NF3, SF6

Chm/Unit Position 6: VESTANV4; Chemicals / Gases Used: HBr, CH2F2, NF3, SF6