2006 KLA Surfscan SP2

Wafer Defect Inspection System

Wafer Size300mm

Vintage May. 2006

Windows System

Main S/W

Wafer Size 300mm SEMI Notch

Facilities

Power: 208 VAC, 3W

N

CDA: > 28.3

Nl /min, > 6.6791 kg /cm2

Vac: > 28.317 l/min, >

700 mm Hg

Load port Vacuum 200mm and 300mm FIMS

Computer

Mouse Keyboard 3.5"

FEC computer