Plasma System Corp. DES-220

Wafer size: 200mm

Date of Last PM : 17th Dec 2015

System is not On-Line

Off-Line Date (if applicable) is June 2016

All Cables are present

Handler Type : Lifter

# of Cassette / FOUP Loaders : 4

No pre-aligner

Communication Interface is SECS

Facility Requirements :

CDA : 5-7 Kg/ cm2

DIW : 75 PsiG/min

Vacuum : Φ150mm 4M / min

Gas : 2 – 4 Kg/ cm2

Power : 208V 60Hz 304W 150A

The Quartz tube*2 / Quartz boat*2 / Matcher*2 / Screen*3 / ISO*2 / Throttle valve*2 / Lifter arm*1 / PLC CV1000*2 may have been missing or damaging.

Not include the Asyst LPT 2200 SMIF loader*2