2006 SEZ Group DV-34

Vintage: 2006

Wafer size: 300mm

Asset HDD not included

Process: SWC

Tool config is based on original PO, please verify tool details at tool inspection

Process module: HF; Poly (HF+HNO3)

Transfer station: ASYST load port; Brooks robot(Dual arm robot)

Sub-unit: CDS (Chemistry Dispense System)

Transfer Configuration

-Carrier transfer

Carier port*3, Tag reader *3

Port door*3, motor*3

Safty light curtain*2

Wafer transfer

Brooks robot:Dual arm robot

Robot linear module

Flip station*2: left & right

Main body

Left ECO:motor*2

Right ECO:motor*2

ECO linear module

chuck: motor*1

elevator: motor*1

dispenser*4, motor*4 & cylinder*2

Tank: HF

Mixture 1: HF

Process tank material: PVDF

Buffer tank material : PVDF

Process temp: 60℃

Heating method: in-line heater (6KW)

Exhaust method: Manual damper

Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)

Return Punmp: Diaphragm pump, model 110

Tank level sensor: ifm electronic (KN5115)

Drain method: pump drain (membrane pump A 10 TTZ )

Drain line: 2 lines

Chemistry tube material: PFA

Tank: Poly

Mixture 1:HF

2: HNO3

Mixing ratio: HF+HNO3

Process tank material: PVDF

Buffer tank material : PVDF

Process temp: 25℃

Heating method: in-line heater (6KW)

Exhaust method: Manual damper

Concentration meter: HORIBA (CS-153)

Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)

Return Punmp: Diaphragm pump, model 110

dosing pump: METERING PUMP (PZ10)

Paddle wheel: Flowmeter, paddle wheel 

Tank level sensor: ifm electronic (KN5115)

Drain method: pump drain (membrane pump A 10 TTZ )

Drain line: 2 lines

Chemistry tube material: PFA