1996 LAM Rainbow 4520 Oxide

LAM Rainbow 4520 (512-136)

Without UI computer, cooler, generator rack and vacuum pump

Process gases: Argon, CF4, CHF3, O2, CO, SF6, N2

Wafer Size RangeMinimum150 mmMaximum200 mmSet Size200 mm

Software Revision LevelE1.7-024

Power Requirements208 V 50.0 A 50/60 Hz

Year of Manufacture1996

ConditionGood

Exterior DimensionsWidth47.244 in (120.0 cm)

Depth98.425 in (250.0 cm)Height66.929 in (170.0 cm)

Weight1,764 lb (800 kg)