2016 LAM WETV18-04

Consisting of the main unit, 3 chemical cabinets and sub-equipment

DescriptionSEZ 304

Wafer Size RangeMinimum150 mmMaximum300 mmSet Size300 mm

Number of Robots1

Position 1

Tank MaterialPVDF

Position 2

Tank MaterialPVDF

Position 3

Tank MaterialPVDF

Position 4

Tank MaterialPVDF

Automatic Wafer TransferYES

Controller TypeMicroprocessor Controller Type

Other Informationthe system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos)

Inline heater for media and DI

Main unit: 12-inch system with handler/gripper with flip option; Pinchuck

Intermediate tanks with Trebor pumps

Levitronix flow meters for heater flow sometimes cause problems

FFU was converted to a different controller/fan (see photos)

Chemistry cabinets:Cabinet 1: Main tank (40L) with buffer tank and buffer functionCabinet 2: Main tank (40L) with buffer tank and buffer functionCabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function

The chemistry computer motherboard was replaced with a different one

A weld on the drain in Chemistry Cabinet 3 was repaired

Year of Manufacture2016

ConditionGood

Power RequirementsOther V 80.0 A

CE MarkedYES