2013 Hitachi U-7050A

Vintage: 2013

Wafer size: 300mm

Asset HDD not included

[Chamber A]

Chamber type:7050 Eching Chamber

Gas config. (sccm)=MFC full scale

 O2(1000)/Ar 96%+CH4 4%(500)/

 Cl2(300)/Ar(1000)/BCl3(300)/O2(200)/

 Cl2(50)/BCl3(50)

MFC Brand: AEJ

RF Top450MHz, max 1000W

RF Btm 400KHz, max 500W

Temp Top +60~+100℃

     Wall +20~+80℃

     ESC +20~+50℃

[Chamber B]

Chamber type:7050 Eching Chamber

Gas config. (sccm)=MFC full scale

 O2(1000)/Ar 96%+CH4 4%(500)/

 Cl2(300)/Ar(1000)/BCl3(300)/O2(200)/

 Cl2(50)/BCl3(50)

MFC Brand: AEJ

RF Top450MHz, max 1000W

RF Btm 400KHz, max 500W

Temp Top +60~+100℃

     Wall +20~+80℃

     ESC +20~+50℃

[Chamber C]

Chamber type:7050 Ashing Chamber

Gas config. (sccm)=MFC full scale

 O2(5000)/H2O(1000)

RF Top13.56MHz, max 2000W

Temp Stage +250℃

[Chamber D]

Chamber type:7050 Ashing Chamber

Gas config. (sccm)=MFC full scale

 O2(5000)/H2O(1000)

RF Top13.56MHz, max 2000W

Temp Stage +250℃