Wafer size: 300mm

Very lightly used in OEM Lab in US; excellent condition as NEW.

1. Electrical power Main Unit: 400VAC, 3P+N, 32A,50/60Hz

2. Electrical Power CDS: 400VAC, 3P+N, 2A, 50/60Hz

3. 300mm wafer process chamber x1

4. 300mm ECO gripper loader/unloader x2

5. 300mm load port x2

6. Front monitor x1

7. FFU and Ion systems

8. CDS: chemical cabinets x3

9. Brooks wafer handling robot and robot controller CE-ATM407C-2 andESC-200

10. Flip module with ceramic end effector 2-sided

11. Medium dispenser arm x1

12. N2/DIW dispenser arm x2

13. 300mm standard pin chuck x1

14. Heating systems: single lauda system x2, double lauda systemx1

15. Rear monitor & access

16. Original manufacturer manual hard copies

17. MU and CDS software boots to manufacturer GUI

Last handled wafer on Sep-2020 before de-installation and crated

2001 SEZ SP304