2006 ASML PAS 5500/1150C

w/ 2x2 cassette/transfer loader

1ea Cymer NL7600A NanoLith laser system, 400V, 70A

1ea mains power cabinet; 1ea Donaldson P199100 LithoGuard filtration unit

1ea Rietschle Thomas SAH 55 (10) exhaust blower; 1ea Rietschle Thomas REL 44050 (23) exhaust blower cabinet; 1ea Quality Power Solutions uninterruptible power system w/ battery pack; 1ea Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner, 75kVA. 120in x 72in x 99in H.

OEM Model Description

The PAS 5500/1150C 193-nm Step-and-Scan system enables cost effective 90-nm ArF mass production. It is the solution for both 90-nm critical and non critical ArF layers, and can be configured with a number of options that enable low-k 1 in manufacturing, extending application of the PAS 5500/1150C below 90 nm.