2001 AMAT CENTURA POLY
2001 AMAT CENTURA POLY
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Description
Tool Status Running Wafers
Wafer Size 200 mm
Fab Section Etch
Vintage 2001
Asset Description DPLY-502 AMAT_CENTURA DPS
POLY
Software Version E4.7_25
CIM NONE
Process METAL ETCHER
Handler System VHP+ ROBOT 1
Main System MAIN SYSTEM
Excluded Items List:
LPT NOT FOR SALE 2
DRY PUMP NOT FOR SALE 1
Specifications
| Manufacturer | AMAT |
| Model | CENTURA POLY |
| Year | 2001 |
| Condition | Used |
| Stock Number | BM7313 |