2001 AMAT CENTURA POLY

Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Etch

Vintage 2001

Asset Description DPLY-502 AMAT_CENTURA DPS

POLY

Software Version E4.7_25

CIM NONE

Process METAL ETCHER

Handler System VHP+ ROBOT 1

Main System MAIN SYSTEM

Excluded Items List:

LPT NOT FOR SALE 2

DRY PUMP NOT FOR SALE 1