1999 AMAT ENDURA 5500

Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Thin Film

Vintage 1999

Asset Description ENDURA 5500HP PVD SYSTEM

Software Version B8.91

CIM SECS

Process BARRIER METL CVD TIN

Handler System LPT 2

Options System

Main System MAINFRAME & SYSTEM CONTROLLER 1