2002 AMAT Ultima HDP

Tool status: running wafers

Wafer size: 200mm

Fab section: thin film

Asset description: Centura CVD

Software version: B5515

CIM: SECS

Process: USG

Main system: Centura 5200 1

Handler system: HP robot 1

Factory interface: none

Excluded items:

ENI rack 3

SMC heat exchanger 1

Ebara SDOU 1

SMIF LPT 2

Ebara AA20N-H 2

Bias match 3

Ebara AAS70

Buffer robot 1

Cathode assembly 1

Turbo pump 1

ENI generator 9