Accretech/TSK UF3000

Production Wafer Prober

Wafer Prober

Currently Configured for: 300mm

Asset HDD not included

With Chiller : SCU-600B

MiCAP Number1212336

Section 1: Tool General Information

Micron MISTI/LID #FE3SKAA300(TMM)

Vendor Tool Serial #F24006MZ

Tool Current StatusIn Production

Tool LocationCleanroom

Any modification/ conversion/ refrofit was perform to the tool?No

Any defective or missing partsNo

Section 2: Tool Specific Information

OEMACCR

Tool ModelUF3000

Software Version (include revision #)

System Power Rating

Loading Configuration

Tool under OEM service contract?

Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)

Part Type Part Description Part number Date of Change Qty Remark

1NA

2

3

For multi-chms system, please indicate the chamber type of individual chm, do not use Micron Proprietary names for Chemical/Gases

(Section is also application to tank configuration for Wet bench)

Chamber DescriptionChamber Chemicals Gases UsedChamber NA