2002 ADE Corporation AFS-3220

Wafer Characterization

Metrology Equipment

Currently Configured for: 300mm

Asset HDD not included

OEM MFG Date is 2002

Install Date is 2002

Date of Last PM is 2017/4/13

The system not On-Line

Off-Line Date is 2017/12/16

The equipment has Missing or Damaged Parts 

Handler Type is BROOKS

Robot Type is BROOKS

End-Effecter Type is BROOKS

Pre-Aligner 

Mini-Environment

System SW (OS) version Windows NT

Supporting Equipment

Power Suppl

AC Dist Box

Facility Requirements

CDA is 40 PSI

Vacuum is -90

Power is 20A, 250V