AMAT / Varian Semiconductor Equipment Associates (VSEA) EHP-500

Mid Current Implanter

Ion Implanters

Currently Configured for: 150mm

Wafer Size (inches)6

Loading ConfigurationOpen Cassette

Software VersionV13.30 revD    

User ID:9    

Password:999

Floppy Drive Type3.5”

Is System On-Line?Yes

CE Mark Certified?Yes

OEM Audit Available?No

Can Produce Wafers AS IS?Yes

Any Known Field Modifications?Yes

All Cables Present?Yes

GEM/SECS Interface Yes(SECS)

SECS II InterfaceYes

Standard Network Communication CapabilityNo

System ConfigurationModel Type 

Mid CurrentE500EHP

Energy Range10KeV to 200KeV

Key Common Options Included?

Clean Room ManualsNo

Standard ManualsNo

Calibration StandardsNo

Machine Configuration 

Remote Service MonitorNo

Narrow Service Monitor CartNo

UPSNo

Fast Cryo RegenYes

Solid State Scanner30KV

Auto DecelNo

Rotating PlatenNo

Roplat TilterYes

Roplat Dual MotorYes

Gas Box TypeHP

Computer TypePentium

Source Material TypeOther

VaporizerNone

Two Stage Beam ReducerNo

Electrostatic PlatenNo

Cooled PlatenYes

OnBoard CryosYes

Cryo N2 HeaterNo

SDSYes

Signal TowerYes

Beam Energy ProbeYes

Beam Purity Check SoftwareYes

Fast Parametric SoftwareYes

Hall ProbeYes

Reversing Source MagnetYes

15amp Arc Power SupplyYes

EHP Beam CurrentYes

EHP Source BushingYes

EHP Metals KitYes

10” Target CryoYes

Load Lock Turbos (EHP)Yes    

Load Lock Turbo TypeV300HT

EHP Wafer Handler SensorsNo

Cassette/Tilt Sensor UpgradeNo

Cassette Present SensorYes

Cassette Interlock UpgradeNo

Wafer Position DetectNo

190KeVYes

ICONNo

Scanning FaradayYes

Cooled Setup FaradayYes

Faraday Limit SensorYes

Exhaust Leak DetectorYes

Grounding Rod Upgrade KitNo

CPI Power Supply UpgradeNo

Ground Fault DetectorNo    

Source Zone Turbo PumpSTP1000    

Beamline Turbo PumpNone    

Scanner Turbo PumpSTP1000    

Mirror Turbo PumpNone    

Resolving Apperture TurboNone    

Analyzer Turbo PumpV300HT

Cyro CompressorsYes    

Manufacturer/ModelCTI-9600    

Quantity1ea

Vacuum PumpsYes     

Pump TypeDry    

Manufacturer/ModelEdward QDP80QDP80+QMB250    

Quantity3ea