2003 AMAT / Varian Semiconductor Equipment Associates (VSEA) E500HP

Mid Current Implanter

Ion Implanters

Date of Manufacture: 2003-08-01

Currently Configured for: 150mm

Tool ID

Impl #2

Date of Audit

1/19/2026

Wafer Size (inches)

8

Loading Configuration

Open Cassette 

Original Ship Date from OEM

Aug-03

Software Version

15.10 Rev A

Floppy Drive Type

RW DVD

Date of Last PM

Sep-24

Is System On-Line?

NO

Off-Line Date (if applicable)

Sep-24

CE Mark Certified?

Yes  /  No

Electrical Requirements

208V 3ph 5 wire

OEM Audit Available?

NO

Can Produce Wafers AS IS?

NO

Any Known Field Modifications?

NO

All Cables Present?

YES

GEM/SECS Interface

YES

SECS II Interface

NO

Standard Network Communication Capability

YES

Mid Current

E500EHP

Clean Room Manuals

NO

Standard Manuals

NO

Calibration Standards

NO

Machine Configuration

Remote Service Monitor

YES

Narrow Service Monitor Cart

NO

UPS

NO

Solid State Scanner

30KV

Auto Decel

YES

Rotating Platen

YES

Roplat Tilter

YES

Roplat Dual Motor

YES

Gas Box Type

HP

Computer Type

PENTIUM

Ion Source Type

BERNAS

Source Material Type

NO SOLID SPECIES

Vaporizer

NONE

Two Stage Beam Reducer

NO

Electrostatic Platen

NO

Cooled Platen

YES

OnBoard Cryos

NO

Cryo N2 Heater

YES

SDS

YES

Signal Tower

YES

Beam Energy Probe

YES

Beam Purity Check Software

YES

Fast Parametric Software

YES

Hall Probe

YES

Reversing Source Magnet

YES

15amp Arc Power Supply

YES

EHP Beam Current

YES

EHP Source Bushing

YES

EHP Metals Kit

YES

10” Target Cryo

YES

Load Lock Turbos (EHP)

YES

     Load Lock Turbo Type

V-250

EHP Wafer Handler Sensors

YES

Cassette/Tilt Sensor Upgrade

YES

Cassette Present Sensor

YES

Cassette Interlock Upgrade

YES

Wafer Position Detect

YES

190KeV

YES

ICON

NO

Scanning Faraday

YES

Cooled Setup Faraday

YES

Faraday Limit Sensor

YES

Exhaust Leak Detector

YES

Grounding Rod Upgrade Kit

YES

CPI Power Supply Upgrade

NO

Ground Fault Detector

NO

     Source Zone Turbo Pump

Yes

     Beamline Turbo Pump

Yes

     Mirror Turbo Pump

Yes

Gas Type

SDS

HP

SDS

HP

External Facilities Connections

AR

Key Common Options

Cyro Compressors

YES

     Manufacturer/Model

CTI / 9600

     Quantity

1

Vacuum Pumps

YES

      Pump Type

DRY

     Manufacturer/Model

IQDP80

     Quantity

1