2003 AMAT ComPLUS MP

2 available

Darkfield Inspection

Metrology Equipment

Date of Manufacture: 2003-01-01

Currently Configured for: 200mm

Asset HDD not included

Wafer Size (inches):8

Is System On-Line? Yes  

Can Produce Wafers As-Is ? Yes  

Any Field Modifications ? NO

All Cables present ? YES

Any Corrosion visible on modules ? NO

Any Missing / Damaged Parts ? NO

Shipping Brackets Included ? YES

Interface Type:Integrated SMIF

# of Cassette / FOUP Loaders:2  

Load-Port Make / Model (#1):LPT 2200

Load-Port Make / Model (#2):LPT 2200

Robot Make / Model 

ex: Yaskawa XU-RC400-B03:ASYST

End-Effecter Type:1 ROBOT

Pre-Aligner ? Yes

Mini-Environment ? Yes

Handler Options ? NO

OHT (300mm only) ? No

Communication Interface

GEM / SECS I / II ? SECS i

HSMS YES

System Software

System SW (OS) version:SUM OS5.8

System SW (App) version:V6.81

Review Microscope

Objectives:2.5 / 5X / 10X/20X/50X

Bright-field (BF) Options:BF

Dark-field  (DF) Options:DF

Review Head Type:OLYMPUS

Facility Requirements

CDA: YES

Vacuum (House / Pump): HOUSE

Power :208 AC 3 PH