2002 AMAT Centura 5200 Ti/TiN MCVD

2 available

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Date of Manufacture: 2002-01-01

Currently Configured for: 200mm

Asset HDD not included

Wafer Size (inches):8 

Install Type:Stand Alone

Software Version:B4226

Is System On-Line? Yes

CE Mark Certified? Yes

Clean Room Manuals:No

Standard Manuals:No

OEM Audit Available? Yes

Decontamination Report Exists? Yes

Can Produce Wafers AS IS? Yes

Any Known Field Modifications? No

All Cables Present? Yes

Mainframe Type:Centura (Common)

System Configuration

    Chamber / Process

Position A:CVD / TiN

Position B:CVD / TiN

Position C:CVD / Ti

Position D:CVD / Ti

Directory of Chamber Types for

TxZ, TixZ:MCVD

Multi-Slot Cooldown:Cooldown

Wafer Orienter:Orienter

Mainframe Items

Signal Lamp Tower:Yes

Loadlock Type :Wide body

   Wafer Mapping:Fast

   Wafer Slide Sensor:Yes

Bolt-On-SMIF:Yes

   SMIF Loader Make/Model:ASYST/LPT2200

Robot Type:HP+

   Blade Type:Quartz

Transfer Lid Hoist:No

Wafer on Blade Sensor:OTF

SBC Version:V452

Remote Service Monitors:No

GEMS:No

RF Generator Details 

Chamber Position :Mfgr. / Model

Position A :AE / PDX 900-2V

Position B: AE / PDX 900-2V

Position C:AE / PDX 900-2V

Position D:AE / PDX 900-2V

Dep Chamber Roughing Pumps

Dep Chamber Pump

Manufacturer:Edward

Model:iH600

Quantity Required:4

Included With System:No

Load Lock Pump

Manufacturer:Edward

Model:iH80

Included With System:No

Transfer Chamber Pump

Manufacturer:Edward

Model:iH80

Included With System:No

AMAT Heat Exchanger

Model:Steelhead

Quantity Required:2

Included With System:No

Gas Box Configuration

Gas Delivery Type:SLD

Gas Panel Interface Type:Standard

Gas Panel Exhaust:Top

Liquid Delivery Type:TICL4

Gas Box Configuration

Gas Line # Gas / Flow (sccm) / MFC Mfgr. / MFC Model

1 Ar / 1000 / STEC / SEC4400M

2 N2 / 1000 / STEC / SEC4400M

3 H2 / 5000 / STEC / SEC4400M

4 Ar / 10000 / STEC / SEC4400M

5 Cl2 / 500 / STEC / SEC4400M

6 Ar / 1000 / STEC / SEC4400M

7 He / 3000 / STEC / SEC4400M

8 NH3 / 1000 / STEC / SEC4400M