1998 AMAT Endura 5500 Aluminum Interconnect

4 available

PVD (Physical Vapor Deposition)

Deposition Equipment

Date of Manufacture: 1998-12-31

Currently Configured for: 200mm

Software: v8.89

Mainframe: Endura 5500

Robot: HP/VHP with Fabworx Blade, Wrist, and Arms

Chambers:

Ch1/Ch3 - AlSi

Pedestal - A101

Enhanced Magnet Cooling

3 Position Cryo Gate Valve

Ch2/Ch4 - No Process

Pedestal - A101 Cool

ChE - Orient Degas

Auxiliaries:

Qty 2 - Neslab 3 HX

Qty 2 - CTI 9600 Cryo Compressor

Edwards IQDP40/QMB250 Rough Pump

MFCs:

Unit 1660 - 11

Horiba Z500 - 2

This system can be fully refurbished