AMAT Endura 300

3 available

PVD (Physical Vapor Deposition)

Deposition Equipment

Currently Configured for: 300mm

Asset HDD not included

·  Factory Interface: 4.0

·  (2) 25-wafer FOUP Loadports

·  PVD Endura Type Controller

·  PVD Endura Type Remote Generator Rack

·  Cryo Compressor

·  Thermo Neslab Heat Exchanger

·  Edwards iQDP80/IQMB250 pump systems for loadlock, system, and process chambers (pumps may not be included)

·  CE Mark

WW Intro / 1st Sys

Module Level Part Desc

FI Top Top 5.3 FI

FI Top Loadport (LP) N2 x2

FI Details FI Aligner High Friction

FI Details S/W CGA SW / CGAfe only for Gen 4.0+

FI Details Server Gen 3.2.1 / Gen 4.0 (After 7/31/18)

MF Top Top P4 MF w/ XP robots

MF Details Motion control type eXMP

MF Details Servo Driver Type ATD

MF Details MF Robot Blade Opera2 Blades

MF Details P4 SWLL Fast Vent Included

MF Details MF ladder N/A

SWLL Top Top MD SWLL

SWLL Details Defect package Al Fins W/ Vespel Pins

SWLL Details Pumping Dedicated pumping

SWLL Details Cooling (pedestal) N/A

Ch E Top Top Degas

Ch E Details Pedestal Grooved

Ch E Details Defect package Terminator (lift hoops & Celazolefingers)

Ch E Details Lifter type Motorized lifts

Ch F Top Top Degas

Ch F Details Pedestal Grooved

Ch F Details Defect package Terminator (lift hoops & Celazole fingers)

Ch F Details Lifter type Motorized lifts

Ch C Top Top Empty

Ch D Top Top Empty

Ch A Top Top Pass through Ch

Ch A Details Pedestal Celazole 

Ch A Details Defect package WW16'2018: Terminator defectivity (Celazole pedestal and Vespel pin) package qualified

Ch A Details Lifter type Motorized lifts (Endura HRR)

Ch A Details Pumping N/A

Ch B Top Top Cool down

Ch B Details Pedestal Celazole 

Ch B Details Defect package WW16'2018: Terminator defectivity (Celazole pedestal and Vespel pin) package qualified

Ch B Details Lifter type Motorized lifts (Endura HRR)

Ch B Details Pumping WW 36' 2018: Dedicated pump

Ch 1 Top Top Empty

Ch 2 Top Top ALD

Ch 2 Details Pedestal MCA 

Ch 2 Details MFC Aera Pi980 / GW125 fw 1.28 in qual on F32 XDK719.  GF125 Fw 1.28 qualifiied on XDK719

Ch 2 Details Process Kit ALD2 TaN

Ch 2 Details Lid type Six injector Lid Cap

Ch 2 Details Gas Panel (# 1 - ampoule , 4 sticks; DMA gas

ampoule, # sticks) stick

Ch 2 Details Ampoule Type Std ampoule

Ch 2 Details Misc Virtual Leak H/W

Ch 3 Top Top ALD

Ch 3 Details Pedestal MCA 

Ch 3 Details MFC Aera Pi980 / GW125 fw 1.28 in qual on F32 XDK719. GF125 Fw 1.28 qualifiied on XDK719

Ch 3 Details Process Kit ALD2 TaN

Ch 3 Details Lid type Six injector Lid Cap

Ch 3 Details Gas Panel (# 1 - ampoule , 4 sticks; DMA gas

ampoule, # sticks) stick

Ch 3 Details Ampoule Type Std ampoule

Ch 3 Details Misc Virtual Leak H/W

Ch 4 Top Top Empty

Ch 5 Top Top N/A: No position 5 on P4

Remotes Top Cryo compressor IS-1000 MF Compressor (0190-54045)

FTF Top FTF N

Compliant

Remotes Top Equipment Rack Rev 3 / 1

Type/ Qty

Remotes Details Fuse Box SCCR 300 Amp

Remotes Top CVD/ Siconi H/X 1 SMC H2000 (0190-53161) @

Qty / Type 60 Hz but also used at 50 Hz

site. P/N: 0190-53162 for 50 Hz

sites.

Remotes Top DI Cooler 0190-54808