2014 HITACHI CG5000

SEM - Critical Dimension (CD) Measurement

Metrology Equipment

Date of Manufacture: 2014-05-01

Currently Configured for: 300mm

Tool config is based on original PO, please verify tool details at tool inspection

Tool current condition: Power on, not on production

Process: Scanning Defect

Software Version: 58.52

System Power Rating: 208 AC 1 Phase

Loading Configuration: 3 L/Ps

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales