AMAT SEMVision G4 Max

SEM - Defect Review (DR)

Metrology Equipment

Currently Configured for: 300mm

Asset HDD not included

Tool

Manufacturer: AMAT Model: Sem Vision G4 Max Wafer Size: 300mm

Technical specifications Illumination mode: E-Beam 4nm resolution at 1kV

Thermo Noran EDX spectrometer

Automatic defect review and classification capability Supports 8" and 12" wafers

Multi perspective imaging (3 perspectives)

EDX and Imaging accelerating voltage from 500V to 15kV SEM AutoFocus

Sony 990 CCD

Optical video Image 2.5x, 20x and 100x

Equipment

Vacuum chamber

Three Wafer tilt positions. 0, 15 and 45 degrees SGI hard drive size: 72GB

Roughing pump stack: Edwards IDQP40 and IDQP80 (subject to availability) Fully SECS 2 compatible

Two Brooks automation fixed load load ports

EDX capability requires cryogenic compressor (subject to availability)

Operator Interface

SGI (main computer) uses IRIX by silicon graphics EDX uses Sun Sparc5 Solaris Operating system MEC (for E-Beam gun) uses Windows NT

WHC (Wafer handling) uses Windows NT Image Computer uses Windows NT Supports NFS (network file sharing) Application Software 5.0.430 compatible

Tool used in a copper manufacturing process.