AMAT Mustang ECD

ECD (Electro Chemical Deposition)

Deposition Equipment

Currently Configured for: 300mm

Asset HDD not included

Section 1: Tool General Information

Vendor Tool Serial #

Tool Current StatusIn Production

Tool LocationCleanroom

Any modification/ conversion/ refrofit was perform to the tool?No

Any defective or missing partsNo

Section 2: Tool Specific Information

OEMAMAT

Tool ModelMustang

Software Version (include revision #)

System Power Rating

Loading Configuration

Tool under OEM service contract?

Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)

Part Type Part Description Part number Date of Change Qty Remark 1NA

2

3

For multi-chms system, please indicate the chamber type of individual chm, do not use Proprietary names for Chemical/Gases(Section is also application to tank configuration for Wet bench)

Chamber Description Chamber Chemicals Gases Used Chamber A1 ECD CuSO₄

Chamber A2 ECD CuSO₄

Chamber A3 ECD CuSO₄

Chamber A4 ECD CuSO₄

Chamber B1 Velocity H₂SO₄/H2O2

Chamber B2 Velocity H₂SO₄/H2O2

Chamber B3 Velocity H₂SO₄/H2O2

Chamber B4 Velocity H₂SO₄/H2O2

Chamber C1 SRM DI Water

Chamber C2 SRM DI Water

Chamber C3 SRM DI Water

Chamber C4 SRM DI Water

Chamber

Chamber

*All OEM cable connecting between FAB to SubFab are required to be list out (Include length in mm)

Cable Description Length

1

2

3