Laser Beam Mask Writing System

Reticle/Photomask Equipment

Currently Configured for: 300mm

Asset HDD not included

Configuration Details:

§ Print head with Automated Material Handling System (AMHS-SMIF)

§ Netra Data Path Processor (DPP), Applied Process Correction Feature

§ System Executive (SE) workstation

§ SECS/GEM control

§ PSM Alignment and printing, PSM printing in 2 or 4 pass mode

§ Printing modes – 4 pass and 2 pass printing

§ SECS/GEM communication and operation compatible

AMAT ALTA 4700i