2005 AMAT Endura II Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Date of Manufacture: 2005-05-01

Asset HDD not included

Section 1: Tool General Information

Tool Excess Date10/30/2026

Tool Current StatusIn Production

Tool LocationCleanroom

Any modification/ conversion/ refrofit was perform to the tool?No

Any defective or missing partsNo

Section 2: Tool Specific Information

OEMAMAT

Tool ModelENDURA2

Software Version (include revision #)eentb5.0_149

System Power Rating

Loading Configuration3 load ports

Tool under OEM service contract?

Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)

Part Type Part Description Part number Date of Change Qty Remark 1NA

2

3

For multi-chms system, please indicate the chamber type of individual chm, do not use Proprietary names for Chemical/Gases(Section is also application to tank configuration for Wet bench)

Chamber Description Chamber Chemicals Gases Used

Chamber Ch-1 STD_AL Ar、N2

Chamber Ch-2 STD_AL Ar、N2

Chamber Ch-3 DS_TN Ar、N2

Chamber Ch-4 DS_TN Ar、N2

Chamber Ch-E H2 Anneal Degas Ar、N2、H2

Chamber Ch-F H2 Anneal Degas Ar、N2、H2

*All OEM cable connecting between FAB to SubFab are required to be list out (Include length in mm)

Cable Description Length

1

2

3

Non-OEM Parts Description

Note: Sending sites also need to highlight to receiving sites, if there is any non OEM parts contained in the tool and will be transferred with the tool

Tool Model Qty Remark

1

2

3

Section 3. Missing / Defective

Description Missing (Qty) Defective (Qty)

NA

Section 4. N2 Load Port Configuration

N2 Load Port Exists N2 Load Port Vendor OEM Stage Available

Yes SP Yes

Yes SP Yes

Yes SP Yes

Section 5. For CVD/Dry Etch - Gas/Chem Configuration

Add Gas/Chem Configuration

Optional Gas Custom Gas Lines TOR

NA