2016 Evatec BAK 901 HP

BAK 901 Chamber

BAK 901 E-Rack

1 x EBS500 (EHV500 transformer, EFS500 filament current, ECS500 coil current, EEC500 e-gun control)

1 x QSK 1222/QCO510 dual-channel quartz crystal thickness measurement system

2 x Leybold CV10.100 cryopumps

2 x Leybold Coolpak 6000H compressors

1 x Polycold PFC672 compressor for Meissner trap

1 x Edwards IGX600L roughing pump

1 x H2O cryopanel