2014 AMAT Producer GT

2014 AMAT Producer GT
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Description
- Applied Materials Producer GT 300 mm system, built in 201. Configured for ATRP process with three chambers, an EFEM with loadlock and buffer, and a FOUP factory interface. Includes Brooks Mag8 FX and Kawasaki ATM robots.Specifications
- Manufacturer: Applied Materials
- Model: Producer GT
- Vintage: 2014
- Wafer Size: 300 mm
- Fab Section: Thin Film
- Software Version: pmB4.3_61
- CIM: SECS, GEM
- Process: ATRP Process
- ConfigurationEFEM with Loadlock and Buffer
- Brooks Mag8 FX Robot
- 3 × FOUP Factory Interface
- 2 × Kawasaki ATM Robot
- Not IncludedGold Box
- Chamber Lid Cover
- Foreline Heater Jacket
- MF EV Manifold
- Dry Pump
- UPS Unit
- RF Strap
Specifications
| Manufacturer | AMAT |
| Model | Producer GT |
| Year | 2014 |
| Condition | Used |
| Stock Number | BM7405 |







