2014 AMAT Producer GT

2014 AMAT Producer GT

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Description

  • Applied Materials Producer GT 300 mm system, built in 201. Configured for ATRP process with three chambers, an EFEM with loadlock and buffer, and a FOUP factory interface. Includes Brooks Mag8 FX and Kawasaki ATM robots.Specifications
  • Manufacturer: Applied Materials
  • Model: Producer GT
  • Vintage: 2014
  • Wafer Size: 300 mm
  • Fab Section: Thin Film
  • Software Version: pmB4.3_61
  • CIM: SECS, GEM
  • Process: ATRP Process
  • ConfigurationEFEM with Loadlock and Buffer
  • Brooks Mag8 FX Robot
  • 3 × FOUP Factory Interface
  • 2 × Kawasaki ATM Robot
  • Not IncludedGold Box
  • Chamber Lid Cover
  • Foreline Heater Jacket
  • MF EV Manifold
  • Dry Pump
  • UPS Unit
  • RF Strap


Specifications

ManufacturerAMAT
ModelProducer GT
Year2014
ConditionUsed
Stock NumberBM7405