AMAT Endura II

PVD (Physical Vapor Deposition)

Deposition Equipment

Currently Configured for: 300mm

Tool Current StatusIn Production

Tool LocationCleanroom

Any modification/ conversion/ refrofit was perform to the tool?No

Any defective or missing partsNo

Section 2: Tool Specific Information

OEMAMAT

Tool ModelENDURA2

Software Version (include revision #)enB3.2_951

System Power Rating

Loading Configuration3 load ports

Tool under OEM service contract?