2017 KLA Filmetrics F20-UV Thin Film Analyser

2017 KLA Filmetrics F20-UV Thin Film Analyser

$29,000 (USD)

Available quantity:1

Description

Filmetrics F20-UV Thin Film Thickness Measurement System – P/N 205-0673

Manufacturer: Filmetrics

Model: F20-UV

Part Number: 205-0673

Serial Number: 17M073

Vintage: Estimate 2017, unconfirmed

Equipment Type: Thin Film Thickness Measurement / Optical Metrology System

Description

Filmetrics F20-UV Thin Film Thickness Measurement System supplied with LS-DT2 Deuterium-Tungsten-Halogen Light Source, Sample Cam, A4 Desktop Scanner, and Dell OptiPlex 3040 Core i5 Desktop Computer with Keyboard and Mouse.

The Filmetrics F20-UV is a benchtop thin-film metrology system designed for non-destructive measurement of thin-film thickness and optical properties using spectral reflectance technology.

The system is suitable for semiconductor manufacturing, wafer processing, optical coating analysis, materials research, and thin-film process development.

The UV-enhanced measurement capability enables analysis of ultra-thin films, including semiconductor dielectric layers, photoresist, and transparent optical coatings.

Technical Specifications

  • Measurement Technology: Spectral Reflectance
  • Measurement Range: 1 nm to 40 µm (film-stack dependent)
  • Spectral Wavelength Range: 190–1100 nm
  • Measurement Type: Non-contact, Non-destructive
  • Measurement Parameters: Film Thickness, Refractive Index and Optical Properties
  • Measurement Configuration: Benchtop / Single-Spot
  • Typical Measurement Applications: Single-Layer and Multilayer Thin Films

Included Equipment

  • 1 × Filmetrics F20-UV Thin Film Analyzer – P/N 205-0673
  • 1 × LS-DT2 Deuterium-Tungsten-Halogen Light Source – S/N 17B012
  • 1 × Filmetrics Sample Cam
  • 1 × A4 Desktop Scanner
  • 1 × Dell OptiPlex 3040 Core i5 Desktop Computer
  • 1 × Keyboard
  • 1 × Mouse

System Serial Number: 17M073

Typical Applications

  • Semiconductor Thin Film Metrology
  • Silicon Dioxide (SiO₂) and Silicon Nitride (SiN) Measurement
  • Photoresist Thickness Measurement
  • Optical Coating Characterisation
  • Thin Film Research and Development
  • Thin Film Thickness and Refractive Index Analysis
  • Transparent and Semi-Transparent Coating Measurement
  • Quality Control and Process Monitoring

The Filmetrics F20-UV provides a compact, versatile solution for laboratories, semiconductor fabrication facilities, universities, and research institutions requiring optical thin-film thickness measurement.

Please contact us for further information, additional photographs, pricing, and availability.

Specifications

ManufacturerKLA Filmetrics
ModelF20-UV Thin Film Analyser
Year2017
ConditionUsed
Stock NumberBM7411
ManufacturerFilmetrics
ModelF20-UV
Part Number205-0673
Serial Number17M073
* Measurement TechnologySpectral Reflectance
* Spectral Wavelength Range190–1100 nm
* Measurement TypeNon-contact, Non-destructive
* Measurement ConfigurationBenchtop / Single-Spot
System Serial Number17M073

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