2009 Suss Microtec Delta 80 RC Coater & Hotplate Track System

Manufacturer / Model: SUSS Microtec Delta 80 RC

Year of Manufacture: 2009

Condition: Fully functional / In working condition

Core Application: Cleanroom / Photolithography spin-coating (photoresists, semi-fluid & viscous liquids)

Key Features: Integrated Edge Bead Removal (EBR), dedicated photoresist tanks & dispense system, and an integrated precision bake hotplate for thermal processing.

The Delta 80RC manual Spin Coater from SUSS

MicroTec is based on the well-known SUSS patented

GYRSET® closed cover coating technology. It

combines state-of-the-art technology with innovative

excellence.

The Delta 80RC can process delicate wafer fragments,

wafers up to 8" (200 mm) or substrates up to

6"x6" (150x150 mm).