2002 AMAT XR80 Leap II High Current Implanter

Description:High current implanterVersion:200 mmVintage:01.06.2002

-Professionally deinstalled from working conditions in the fab.

-Refurbished, re-installed and can be inspected by appointment.

NO#  Check point  Condition  Type/Model  Signature  Remarks

1  Main Components         

1.1  Processor Module  OK       

1.2  Beamline Module  OK       

1.3  Source Services Module  OK       

1.4  Processor Rack  OK       

1.5  Heatexchanger/PDU  Ok       

1.6  Mini Enviroment  N/A       

1.7  Mobile PC, Desk, Monitor, Keyboard &  OK       

1.8  Clean room PC & Monitor  OK       

1.9  Control Module (9500)  N/A       

1.10  Enclosure  OK       

1.11  Signal Tower  OK       

1.12  TEM Probe  OK       

1.13  VESDA smoke detector  No       

1.14  ISO TX  OK       

1.15  Mains Matching TX  No       

2  Beamline, Controllers PSU's And Assy:         

2.1  Pre Accel/Mag Cont  OK       

2.2  Beamline Inst  OK       

2.3  Vacuum Cont  OK       

2.4  Post A Cont  No       

2.5  Turbo Controllers  OK       

2.6  Focus PSU  OK       

2.7  Decel PSU  OK       

2.8  A Mag PSU  OK       

2.9  Pre A Converter PSU  OK       

2.10  Source Mag PSU  OK       

2.11  Suppession PSU  OK       

3  Beam Path Components, Source / Extraction/Flight Tube / MRS And PFS Assy:         

3.1  Source Head Type  OK  Tetrode IHC     

3.2  Extraction Type  OK  Dual Bellows     

3.3  Flight Tube  OK       

3.4  MRS  OK       

3.5  Pre Defining  OK       

3.6  PFS Type  OK  HD PFS     

4  Gas Cabinet (source services):         

  Module    SDS/HP     

4.1  PH3    SDS     

4.2  BF3    SDS     

4.3  AsH3    SDS     

4.4           

4.5           

4.6           

4.7  Purge Module  OK       

  PSU's, Controllers and Assy:         

4.8  Gas and Temp Cont  OK       

4.9  Filament PSU  OK       

4.10  Arc PSU  OK