2020 Disco DTG 8460

DISCO DTG 8460 Backside Grinder

(Qty 2) Load ports

-3x Universal Chuck Table for 12”

-Low vibration Air Bearing Spindle

-Robotic Wafer Transportation System

-Vacuum Pump System

-GUI – Graphical Operation Panel and Video Display Unit

-Electrical Unit & Main Body Lifting Jig Set

-Signal Tower

-Power: 200V 3 phase (without Transformer)

-CE-mark and EMC conformity

-English Operation/Trouble Shooting Manual

-Standard Accessories

- Duct Unit Assembly – filtration and air suction

- Spindle Protection Device in case of air leakage switch to reserve air/N2

- Wafer Protection Device - hold Wafer during Vacuum leakage

- UPS- Uninterruptable Power Supply (with English manual)

- Disco Standard SECS / GEM Software lt. Protocol

- T2 Pad Cleaning System (standard: universal, non ceramic !)

- Software Modification Offset for Positioning Table

- External water nozzle on Z1 + Z2 wheel with adjustable flow rate

- Adjustable water flow on T2 Pad to avoid drying up of pad surface

- Automatic Set-up of wheel and Chuck after wheel change

- Ionizer on Spinner Station

Water Temperature Unit DTU1531 Two separate temperature process cycles for Spindle cooling water and grinding water (without Transformer)

Cooling Water System Spindle Motor (circulation type)

-Temp. setting range of supplied water: 15 – 30°C

-Temp. Accuracy Assurance Range: 20 to 25°C

-Temp. fluctuation range of supplied water: +/- 0,5°C

-Cooling capacity: 1.5 kW (at water temperature of 20°C)

-Water pumping capacity: 15 L/min at 0.30/0.35 MPa

Cutting Water System (waste type)

-Temp. setting range of supplied water: 15 – 30°C

-Temp. Accuracy Assurance Range: 20 to 25°C

-Temp. fluctuation range of supplied water: +/- 0,5°C

-Water pumping capacity 25 L/min at 0.27/0.29 MPa

-Cooling capacity: 6.3 kW(possible to cool water of 25 L/min up to about 3.6°C)

-Heating capacity 12.5 kW (possible to cool water of 25 L/min up to about 7.2°C)

FOUP opener Unit Double Port with mapping system Applicable cassette: FOUP (SEMI compliant), FOSB (SEMI compliant), 300 mm/200 mm double slot cassette, 300 mm/200 mm DBG cassette, 200 mm open cassette (adapter required)