2004 Hitachi Kokusai Electric DJ-1206VN-DM (Quixace1/QMN)

Wafer Size 300mm

Vintage Mar. 2004

(1)Furnace

Furnace:Quixace-Mini(Silicabake)

Heatertype:D4EX25085RHCHeat(Quick-cooling)

Exhaustpressurecontroller:RC-100

Furnacemount

Scavenger

Processexhaustduct

(2)Automation

I/Oshutter

FOUPtransferunit

FOUPloader

RotationFOUPrackunit:12stepcarrierstage

FOUPOPENERunit

Waferdetectunit

Notchdetectunit

Wafertransferunit

Waferchuck:1wafer+4waferpitchconvert

Boatelevatorunit:Up/Down

Boatrotationunit

Furnaceshutterunit

(3)Gas(N2,O2)

Gaspressurizeunit:Silicabake

Gasdetector

GasBox

(4)Controller

Systemcontroller:CX3010

Temperaturecontroller:CQ1700

Power control unit