Suss MA150cc Mask Aligner

Sold as-is

- Model: MA150cc

- Manufacturer: Suss MicroTec / Karl Suss

- Topside Alignment

- Cassette to Cassette Operation

- Can be used in either Automatic or Manual Mode

- Automatic Alignment

- Optical Prealigner

- Max Wafer Size: 6"/150mm Wafer Capable

- 1000 Watt Lamphouse

- UV400 Optics (for 365nm and 405nm exposure)

- UV400 Front Lens

- Suss CIC1000 Lamp Power Supply

- Suss DVM6 Microscope

- CCD Camera Right and Left

- Capable of Hard, Soft, and Vacuum Contact Exposure Modes

- Flat Panel Touchscreen

- Operations Manual for Suss MA150

- Refurbished to Meet Original Suss MA150 Mask Aligner Specifications

REFURBISHMENT PROCESS consists of:

1) Main System Body:

- Ellipsoidal Mirror Replaced with New

- UV Bulb Replaced with New

- Cold Light Mirror Inspected & Replaced as Needed

- Front Turning Mirror Inspected & Replaced as Needed

- Front Lens Inspected & Replaced as Needed

- Shutter Cylinders Replaced with New

- Mirror House Cylinder Replaced with New

- Lamp Power Supply Tested & Repaired or Replaced as Needed

- Exposure Optics Tested

- Microscope Illumination Bulbs Replaced with New

- Microscope Assembly Inspected and Adjusted as Needed

- Full Optical Alignment of Microscope Performed as Needed

- Machine is Fully Tested to Verify Compliance to Original Specifications

- WEC Head Rebuilt

- Pneumatic Regulators Inspected & Replaced as Needed

- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:

- Isolation Table Air Bags Inspected & Replaced as Needed

- Pneumatic Regulators Inspected & Replaced as Needed

- Air lines Inspected & Replaced as Needed

- Wheels Inspected & Replaced as Needed

- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:

- Transport Slide Rebuilt

- Pre-Aligner Assembly Rebuilt

- Wafer Alignment Stage Rebuilt

- Cassette Elevator Rebuilt

Condition:

Used