Disco DFD-3D/8 Fully Automatic Dicing Saw

Status: excellent

Application: Dicing/Cutting/Slotting various wafers

◆ X - axis Section

Drive Method: AC Servo Motor-ball Screw

Minimum Stroke: 652mm (25.7") (end to end)

Set-up Cut Stroke: 220mm (8.7")

Cut Speed: 0.7~3000mm/sec (0.0028 to 11.8" /sec) (Programmable)

◆ Y - axis Section

Drive Method: AC Servo Motor-ball Screw

Maximum Stroke: 250mm(9.8") (end to end)

Set-up Cut Stroke: 200mm(8.7")

Min Index Step: 0.001mm (0.00004")

Single Pitch Error: ≤0.003mm(0.00012")

Cumulative Pitch Error: ±0.005mm/200mm (±0.0002"/7.9")or less

The Zero Point Position: ±0.001mm(±0.00004")

Index Speed: 30mm/sec

Indexing Method: Linear Scale Closed Loop System

Indexing Accuracy: Single Pitch 0.003mm Cumulative Pitch 0.005mm/200mm

◆ y - axis Section

Drive Method: Pulse Motor-Triangular Screw

Maximum Stroke: 25mm(0.98")

Minimum Step: 0.001mm(0.00004")

Indexing Method: Linear Scale Closed Loop System

◆ Z - axis Section (Z1,Z2-axis : DFD-3D/8, Z1-axis : DFD-3S/8)

Drive Method: Pulse Motor-ball Screw

Maximum Stroke: 25mm(0.98")

Minimum Step: 0.001mm(0.00004")

Indexing Method: Rotary Encorder

◆ Θ - axis Section

Drive Method: AC Servo Motor-harmonic Gear

Rotation Angle (end to end): 150 ˚ (end to end)

Accuracy of Determining a Position: ±2sec

Min Index Angle: 1.62"

◆ Spindle Section

Method: High Frequency Air Spindle

Output: 2.2kW

RPM: 3,000 ~ 40,000 (Programmable)

◆ Spinner Section (DFD-3D/8 ,3S/8)

Wash Method: High-pressure jet spinner washing system

Dry Method: Air (N2) or Spinner Rotation System

Drive Method: AC Servo Motor-Direct Drive

RPM: 3,000 rpm MAX

Process: Wash → Rinse → Dry

Wash/dry Time: 600 Sec Maximum

Accuracy of Table Positioning During Rotation: ± 1 ˚

◆ Alignment Section

Alignment Method: CCD Camera Pattern Matching System (DFD-3D/8 , 3S/8)

Microscope:

Single Object Magnification (a b Selectable)

  Macro Micro Objective lens

a 2.66 X 7.5 X 1.4 X D

b 7.08 X 19.88 X 3.8 X D

With Auto Focus Mechanism

◆ Handling Section

Method: Combination of Cross-flow Robot Arm System and Cassette Elevator

Application Frames: 2

Cassette Pitch1/4" or 3/16"

◆ Supply

Power: 3 Phase 50/60 Hz, AC 200/220 V, 5 KVA (AC 200 ~ 415V Transformer Necessary)

Cooling Water (tap Water): 2Kg/㎠ㆍG 4.5 Liters/Min (28.4 psiㆍG1.19 gpm)

D.I Water (Cutting/Washing): 4Kg/㎠ㆍG 9 Liters/Min (56.8 psiㆍG 2.38 gpm)

Air Pressure: 5.5kgf/㎠ ㆍG 600 Liters/Min (78.1 psiㆍG 158 gpm)

N2: 5.5kgf/㎠ ㆍG 150 Liters/Min (78.1 psiㆍG 39.6 gpm)

Machine Size (WxDxH): 1,830 x 1,100 x 1,655mm (72x43x65") including monitor but excluding projection

Machine Weight: 1500kg (3370 lbs)