2010 SAMCO PD200STP Teos CVD

SUMCO PD-200STP

Vintage: 2010

CVD (Teos)

Power supply: 3-phase 200V 50A Power supply:

Single-phase 200V 40A Frequency 50Hz

Body W1370 D1800 H2000  1000Kg

Mechanical booster pump W430 D704 H880  150Kg

Rotary pump D170 W519 H253  30Kg

Oil filtration W250 D250 H460  20Kg

Detox cabinet W600 D600 H1500 50Kg

Source tank for TEOS 2L

6" wafer

Working condition, sold as is