Neocera Magma C20 Scanning SQUID Microscope for magnetic field imaging

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Description

Non-contact non-destructive testing of samples at room temperature.

Magnetic fields as small as 20pT (picoTesla) can be detected in wires carrying only 10nA of current at a distance of 100um from the SQUID sensor.

SQUID sensor is kept under high vacuum by Pfeiffer turbo pump with diaphram backing pump

Integral Cryocooler maintains sensor to under 80Kelvin (LN2 not required)

Newport 6"x12" XY stage with Newport 6000 controller for raster scanning of sample.

STAR Cryoelectronics SQUID sensor

Renishaw touch probe for vertical positioning of sample from sensor

Optem microscope with Hamamatsu IR camera for optical imaging of device under test.  The current image is overlaid over the optical image.

Sample is separated from SQUID sensor (under vacuum and at low temperature) by a very thin diamond window.

Below is a reprint from Electronic Weekly

Chip metrology tool uses magnetic fields


Neocera claims to be the first company to apply magnetic fields to semiconductor failure analysis with the introduction of a failure analysis imaging tool. The tool, dubbed the Magma C20, maps magnetic fields to detect defects in semiconductors by using a highly sensitive magnetic sensor, with low current sensitivity, to see through packaging and interconnect layers to evaluate current intensity and locate “buried” defects. The US firm said traditional imaging tools such as thermal systems or x-rays have been unable to pinpoint defects in next generation chips, which are becoming increasingly complex with multiple layers of transistors. The Magma C20 does not come into direct contact with the wafer, keeping it fully intact, the company said.

Specifications

ManufacturerNeocera Magma
ModelC20 Scanning SQUID Microscope for magnetic field imaging
ConditionUsed
Stock NumberBM748