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AMAT 0010-76385 CHAMBER LID 11.3" Source Assy PVD, 0010-20224 AL Magnet, 106867
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AMAT 0041-86235 Coated Heater Assy, 115668
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AMAT 0010-37176 ESC Assembly, Chuck, 300 MM , DPS AE Etch Chamber, 326850
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AMAT 0040-01761 Endura Pre-clean Chamber Body, Sputter, PVD, 424141
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AMAT 0010-30686 High Efficiency RF Match MXP, 0020-34831 A, HLZ-140-062, 102789
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AMAT 0010-09979 P5000 ASSY LAMP MODULE AU-PLATED BASIC, 104806
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AMAT 0010-09237 LAMP MODULE ASSY 200MM P5000 CVD, 0020-09549, 107264
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AMAT 0010-09335 P5000 CVD 6" Teos Lamp Module, 104804
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AMAT 0010-10455 DELTA 500W LAMP P5000, 0020-31108, 0010-09916, 111216
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AMAT 0040-32630 8" HT DX2 HEATER, 113774
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AMAT 0010-01994 Rev.001, Magnet Assembly, PVD, Endura, Sputter Chamber, 417376
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AMAT 0010-20442 RF Match Assy, 8", Endura, PVD, 60MHz RF Match DPS 416159
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