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KE DD853 Furnace system
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See attached files for full config.
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2007 KE DJ-1206VN
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Wafer size: 300mm Process: furnace
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KE 803 – Verton 3A – pyro
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Never installed SiC pedestal can be supplied as an option. Does not include any quartware Tool...
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1997 KE KE DD-823V
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Process: H2 ANNEAL General Information: 1 System Layout: Main , Utility 2 System Type: L Type ...
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1995 KE KE-DD 823V
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Process: H2 ANNEAL 1- System Layout: Main , Utility 2- System Type: L Type 3- Side Maintenance...
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