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FLAT SCREEN NATIONAL DISPLAY SYSTEMS DM-3S12/ZN

TEACH PENDANT

INDEXER END EFFECTOR

I/O CONTROLLER

DLCM POWER CONTROL ASSY

INDEXER END EFFECTOR

VAT VALVE ASSY

POWER SUPPLY

LEFT LOADLOCK INTFC PCB

VAT VALVE ASSY

WaferSize: 12 Specification: Missing : Load Port 2ea, Loadlock 2ea, IOC#1,2,3, Vac Fore-line, HF ...