200mm Tungsten CVD

2 available

NOVELLUS, INOVA NEXT, 300mm

Installed and under working condition

Main Body Remote AC Sigma6 EGSS △−Y Trans ＜Gas Configuration＞ N2, SiH4, N2O, C2F6,O2, NH3, ...

200mm Refurb – ready for installation

300mm Condition: De-installed with missing parts

New old stock parts

200mm CVD

1 Mainframe w/ 3 Chambers Damages/Deficites: Chamber Turbo Pumps & HF/LF Generators EOL: Turbo ...

Deinstalled from a tier 1 fab earlier this year I think) in working condition 200MM, PVD SYSTEM ...

M-WCVD-03